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9033638 |
OHT accessible high density stocker and method
A storage system for items such as substrate carriers includes at least one stocker including a plurality of storage areas each adapted to store at least one storage device. At least one movable... |
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9027739 |
Wafer transport system
A substrate transport system includes a substrate cart inside a chamber and a linearly driven shuttle outside the chamber configured to levitate the substrate cart into a non contact, spaced... |
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9028191 |
Substrate processing apparatus and method of manufacturing semiconductor device
Reduction in cooling rate of a substrate having a lower temperature is suppressed because the substrate having a lower temperature is not affected by radiant heat of a substrate having a higher... |
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9022714 |
Substrate processing system and substrate transferring method
A substrate processing system and substrate transferring method capable of transferring a substrate bi-directionally through the use of substrate transferring device provided between two rows of... |
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9016998 |
High throughput, low volume clamshell load lock
A load lock having a reduced volume, thereby allowing faster pumping and venting, is disclosed. The load lock uses a movable bottom wall to modify the volume of the chamber to be pumped. In a... |
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9011065 |
Vacuum processing apparatus and operating method of vacuum processing apparatus
A vacuum processing apparatus which includes an atmospheric transfer chamber having a plurality of cassette stands for transferring a wafer, a lock chamber for storing the wafer, a first vacuum... |
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9010384 |
Load port
A load part has a nozzle unit having outlets for generating outflow and/or inflow of gas used for replacing the atmosphere of a wafer storage container, in a direction approximately parallel to... |
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9011632 |
Support disk fixing apparatus, manufacturing method for a semiconductor device using this apparatus, and semiconductor manufacturing apparatus
A support disk fixing apparatus which includes an upper surface to which a wafer is bonded, a lower surface, a cylindrical side surface between the upper surface and the lower surface, and a... |
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9011064 |
Device and method for holding a substrate
A device and method for holding a substrate, e.g., a semiconductor wafer, during a process, e.g., a liquid meniscus process, the substrate having a first side and a second side. The device... |
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8998553 |
High throughput load lock for solar wafers
A system for transporting substrates from an atmospheric pressure to high vacuum pressure and comprising: a rough vacuum chamber having an entry valve and an exit opening; a high vacuum chamber... |
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8998552 |
Processing apparatus and processing method
To provide a processor and a processing method to make the operation to load and unload workpieces to and from a processing chamber more efficient, and improve workpiece processing efficiency. A... |
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8992153 |
System and method for substrate transport
Introduction of substrates into vacuum environment is accomplish by gradually reducing the number of substrates being transferred simultaneously as the clean and evacuated environment is... |
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8996154 |
Robot system and method of manufacturing workpiece
A robot system according to one aspect of an embodiment includes a robot and an instructing module. The robot holds one of a plurality of feed materials used for processing a workpiece. The... |
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8985929 |
Substrate processing apparatus, substrate processing method and storage medium
A substrate processing apparatus includes: a carrier block including first and second carrier placement units spaced apart in a right and left direction; a processing block having a layered... |
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8979463 |
Load port apparatus
To prevent an overload from being imposed on a door drive mechanism when driving a door increased in weight due to upsizing so that reproducibility of a stop position of the door can be ensured,... |
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8979462 |
Substrate-processing apparatus and method of transferring substrate in the same
A substrate-processing apparatus includes a plurality of process chambers, a buffer unit, and a transfer member. The transfer member transfers the substrate between the process chambers and the... |
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8978718 |
Purge device and load port apparatus including the same
To generate a gas-curtain for a load-port-apparatus and to supply a purge-gas into a pod by a single gas source, provided is a gas purge device including: purge nozzles extending along an outer... |
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8974167 |
Automatic storage system
The front automatic storage system includes a plurality of shelves, a transferring apparatus, and a moveable frame. The shelves are arranged facing a semiconductor processing apparatus and at... |
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8972036 |
Method of controlling substrate processing apparatus, maintenance method of substrate processing apparatus and transfer method performed in substrate processing apparatus
Only a wafer for QC check may be transferred and a production wafer may prevent from being transferred into an assigned process chamber whose QC check is not completed after a maintenance task,... |
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8955406 |
Workpiece transfer apparatus
The vacuum seal unit of a workpiece transfer apparatus includes a plurality of seal rings and a cooling flow passage formed so as to circulate through inside a rotating shaft and a workpiece... |
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8950998 |
Batch substrate handling
A substrate-handling vacuum robot includes a first robotic arm with a single-substrate end effector and a second robotic arm with a batch end effector. The single-substrate end effector permits... |
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8950999 |
Substrate processing apparatus and particle adhesion preventing method
Any particle adhesion onto the surface of a substrate to be processed is prevented. There is provided a substrate processing apparatus characterized by including a transfer chamber for, via a gate... |
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8944739 |
Loadport bridge for semiconductor fabrication tools
A wafer handling system with apparatus for transporting wafers between semiconductor fabrication tools. In one embodiment, the apparatus is a loadport bridge mechanism including an enclosure... |
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8944738 |
Stacked process modules for a semiconductor handling system
Methods and systems are provided for a vacuum-based semiconductor handling system. The system may be a linear system with a four-link robotic SCARA arm for moving materials in the system. The... |
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8936507 |
Semiconductor manufacturing apparatus
Provided is a semiconductor manufacturing apparatus including an atmospheric transfer device capable of suppressing corrosion of a part without having a corrosion resistant part and, also, capable... |
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8936050 |
Lid opening and closing device
A lid opening and closing device for a semiconductor manufacturing apparatus having a partition wall configured to divide a carrier conveying region and a substrate conveying region, the partition... |
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8926251 |
Container storage facility
The present invention provides a container storage facility in which inert gas can be supplied to a container in a container storage section that can be moved between the storage position and the... |
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8920097 |
Wafer handling system for a loadlock
A wafer handling system includes providing a loadlock tray assembly having a plurality of vertically-stacked loadlock trays; and mounting nipples around each of the plurality of vertically-stacked... |
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8919830 |
Barrier isolator port assembly
A barrier isolator port assembly for connecting to a conventional docking port of an isolated enclosure is provided. The port assembly includes an annular body, a door assembly and a lock. The... |
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8924118 |
Transfer system
A transfer system according to an embodiment includes a transfer room, a robot, a trajectory generator, a determination unit, and an output unit. The transfer room has an exclusive area defined by... |
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8918203 |
Substrate processing apparatus
A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA... |
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8909369 |
Transport facility
A transport device is configured to transport different kinds of articles which have different lengths from the held portion or a position corresponding to the held portion to one end portion... |
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8898926 |
Substrate dryer using supercritical fluid, apparatus including the same, and method for treating substrate
The present invention is directed to a substrate dryer, a substrate treating apparatus including the substrate dryer, and a substrate treating method. The substrate dryer includes a chamber, a... |
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8899291 |
Laminating apparatus
A laminating apparatus is provided which causes a resin film to completely conform to protruding and recessed portions of a substrate, and which makes the film thickness of the conforming resin... |
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8893642 |
Airflow management for low particulate count in a process tool
In various exemplary embodiments described herein, a system and related method to provide airflow management system in a substrate production tool includes a housing to couple the substrate... |
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8893877 |
Baggage deposit system
In a device (4) for receiving a piece of baggage (2) for transport, for example at an airport, the device comprises a receiving room (18A) with an infeed opening and a discharge opening. The... |
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8888434 |
Container storage add-on for bare workpiece stocker
The present invention relates to apparatuses and methods to store and transfer objects, and more particularly to workpiece stocker configurations such as stocker for semiconductor wafers, reticles... |
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8888920 |
Imprint system, imprint method, and non-transitory computer storage medium
The present invention is an imprint system including an imprint unit transferring a transfer pattern to a coating film formed on a substrate using a template having the transfer pattern formed on... |
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8888433 |
Reduced capacity carrier and method of use
A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at... |
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8882429 |
Transfer device, processing system, control method of transfer device, and computer-readable storage medium
A transfer device for transferring a transfer target object includes a support member, which is movable forward and backward, for supporting the transfer target object, and a sensor for detecting... |
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8870513 |
Vacuum treatment apparatus
A transport arrangement (100) for bi-directionally transporting substrates towards and from a load lock (5) comprises a first substrate handler (1) swivelable about a first axis (A1) and with at... |
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8870514 |
Semiconductor manufacturing process module
A semiconductor handling system including a vacuum workpiece handling system having a vacuum environment therein, the vacuum workpiece handling system including at least two workpiece handling... |
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8869967 |
Dynamic load lock with cellular structure for discrete substrates
A dynamic load lock chamber that includes a plurality of actuators positioned along its length to achieve a desired pressure gradient from an atmospheric pressure side to a processing pressure... |
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8870512 |
Sealed substrate carriers and systems and methods for transporting substrates
An electronic device manufacturing system is disclosed. The system includes a processing tool having one or more processing chambers each adapted to perform an electronic device manufacturing... |
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8851820 |
Substrate container storage system
A storage system and methods for operating a storage system are disclosed. The storage system includes a storage system assembly positioned at a height that is greater than a height of a tool used... |
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8851817 |
Universal modular wafer transport system
The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle... |
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8839959 |
Component sorting and wasting device in component mounting apparatus
A component sorting and wasting device is provided with a plurality of waste boxes having respective IDs and arranged at predetermined locations for receiving components to be wasted therein and a... |
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8840728 |
Imprint system for performing a treatment on a template
The present invention is a template treatment apparatus forming a film of a release agent on a template having a transfer pattern formed on a front surface thereof, the template treatment... |
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8834088 |
Elevator linear motor drive
Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe,... |
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8827618 |
Transport system
A semiconductor workpiece processing system including at least one substrate processing tool that has a common housing with a first side having a first substrate holding container interface and a... |